The premises consist of two large laboratory rooms in the third floor (B306-308, B304) and three clean rooms in the basement (AK08-10) of Physicum. The rooms are equipped with inlets for typical laboratory gases: oxygen, nitrogen and argon. A special room for handling the most common chemicals is also available.
The clean rooms contain two class-1000 rooms (85 m2) and a small class-100 room (10 m2). Particle concentration, relative humidity and the oxygen level in the clean rooms are constantly monitored. Large part of the area is protected agains electrostatic discharges (ESD). The rooms have vacuum lines for component handling and hig-vacuum applications. Cooling water circulation and exhaust duct having slight underpressure are also available.